Gate dielectric integrity [electronic resource] : material, process, and tool qualification / Dinesh C. Gupta and George A. Brown, editors.
Series: Journal of ASTM International ; STP 1382.Publication details: West Conshohocken, Pa. : ASTM International, c2000.Description: 169 p. in various pagings : ill., charts, diagrs., tablesISBN:- 9780803126152
- 0803126158
| Item type | Home library | Call number | Status | Date due | Barcode | Item holds | |
|---|---|---|---|---|---|---|---|
| Online resource | Online Resource Electronic book | Available |
"ASTM Stock : STP1382."
Includes bibliographical references and indexes.
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