Surface scattering and diffraction for advanced metrology II :

Surface scattering and diffraction for advanced metrology II : 9 July, 2002, Seattle, Washington, USA / Zu-Han Gu, Alexei A. Maradudin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Boeing Company ... [et al.]. - Bellingham, Washington : SPIE, c2002. - vii, 186 p. : ill. ; 28 cm. - SPIE proceedings series ; v. 4780 .

Includes bibliographic references and author index

0819445479


Surface roughness--Measurement--Congresses
Diffractive scattering--Congresses
Optical measurements--Congresses
Scattering (Physics)--Congresses
Metrology--Congresses